1/29/2010	9:15:59 AM	Helium valve opened
1/29/2010	9:16:32 AM	SiCl4 pre valve opened
1/29/2010	9:17:04 AM	SiCl4 pre valve closed
1/29/2010	9:17:05 AM	Helium valve closed
1/29/2010	9:17:25 AM	SiCl4 pre valve opened
1/29/2010	9:17:32 AM	SiCl4 pre valve closed
1/29/2010	9:17:37 AM	Helium valve opened
1/29/2010	9:17:51 AM	Helium valve closed
1/29/2010	9:18:41 AM	Bypass valve closed
1/29/2010	9:18:42 AM	Main Vac valve closed
1/29/2010	9:21:14 AM	Main Vac valve opened
1/29/2010	9:21:25 AM	Main Vac valve closed
1/29/2010	9:48:56 AM	Bypass valve opened
1/29/2010	9:49:03 AM	Main Vac valve opened
1/29/2010	12:53:46 PM	Bypass valve closed
1/29/2010	12:53:47 PM	Main Vac valve closed
1/29/2010	12:55:46 PM	Bypass valve opened
1/29/2010	12:56:19 PM	Main Vac valve opened
1/29/2010	2:09:29 PM	Program started after a nonstandard shutdown
1/29/2010	2:16:05 PM	Bypass valve opened
1/29/2010	2:16:05 PM	Main Vac valve opened
